1892 Discovery of the photoelectric effect (Elster & Geitel)
1921-26 Experimental demonstration of electron diffraction (Davisson & Germer)
1953 First electron-beam interferometer with a set-up analogous to the Mach-Zehnder interferometer
1960 Electron-beam interferometer using artificially produced slits (Jönsson)
1974 Interference of neutrons at a silicon single crystal (Rauch, Treimer, Bonse)
1991 Interference of entire helium and sodium atoms (Carnal & Mlynek, Keith et al.)
1999 Molecular interferometer with C60 and C70 molecules (Arndt & Zeilinger)